ISO 14644 Standards were first formed from the US Federal Standard 209E Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones. The need for a single standard for cleanroom classification and testing was long felt. After ANSI and IEST petitioned to ISO for new standards, the first document of ISO 14644 was published in 1999, ISO 14644-1.
In 2000, ISO 14644-2 was published, which began the process of FED-STD-209E being canceled. On November 29, 2001, the document was canceled and superseded by ISO 14644-1 and ISO 14644-2.
- ISO 14644 is now composed of
- ISO 14644-1: Classification of air cleanliness
- ISO/DIS 14644-1.2(2014): Classification of air cleanliness by particle concentration
- ISO 14644-2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1
- ISO/DIS 14644-2.2(2014):Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
- ISO 14644-3: Test Methods
- ISO 14644-4: Design, Construction, and Start-up
- ISO 14644-5: Operations
- ISO 14644-6: Vocabulary
- ISO 14644-7: Separative devices (clean air hoods, gloveboxes, isolators and minienvironments
- ISO 14644-8: Classification of airborne molecular contamination
- ISO 14644-9: Classification of surface particle cleanliness
- ISO 14644-10: Classification of Surface Cleanliness by Chemical Concentration
- ISO 14644-12: Classification of Air Cleanliness by Nanoscale Particle Concentration
